diff --git a/src/cmd/compile/internal/amd64/ssa.go b/src/cmd/compile/internal/amd64/ssa.go
index e3129edbf1..49ef415e66 100644
--- a/src/cmd/compile/internal/amd64/ssa.go
+++ b/src/cmd/compile/internal/amd64/ssa.go
@@ -867,10 +867,10 @@ func ssaGenValue(s *gc.SSAGenState, v *ssa.Value) {
 	case ssa.OpAMD64POPCNTQ, ssa.OpAMD64POPCNTL:
 		if v.Args[0].Reg() != v.Reg() {
 			// POPCNT on Intel has a false dependency on the destination register.
-			// Zero the destination to break the dependency.
-			p := s.Prog(x86.AMOVQ)
-			p.From.Type = obj.TYPE_CONST
-			p.From.Offset = 0
+			// Xor register with itself to break the dependency.
+			p := s.Prog(x86.AXORQ)
+			p.From.Type = obj.TYPE_REG
+			p.From.Reg = v.Reg()
 			p.To.Type = obj.TYPE_REG
 			p.To.Reg = v.Reg()
 		}